MEMS sensors, or Microelectro Mechanical Systems, are multidisciplinary frontier research areas developed on the basis of microelectronics technology. The application of MEMS sensors involves various disciplines and technologies such as electronics, machinery, materials, physics, chemistry, biology, and medicine, and has broad application prospects. As of 2010, there were more than 600 companies around the world engaged in the development and production of MEMS, and hundreds of products including miniature pressure sensors, acceleration sensors, micro inkjet printheads, and digital micromirror displays have been developed. Among them, MEMS sensors account for a considerable proportion. MEMS sensors are new sensors made using microelectronics and micromachining technology. Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and intelligentization. At the same time, the feature size in the micrometer range makes it possible to perform functions that some conventional mechanical sensors cannot.
Xiao Bian today explained the application of MEMS sensor technology in automotive safety systems. MEMS sensors are mainly used in automotive airbag systems, anti-skid systems, car navigation systems and anti-theft systems.
Application of MEMS Sensor in Airbag System
In order to monitor this state of rolling of the vehicle, it is important to combine the sensor signal output by the gyroscope with the output signal of the low g acceleration sensor. By processing the signals given by the two sensors, the system's algorithm determines the angle between the Z-axis and the vertical line of the car, and the angular velocity of the vehicle, ωx, at each moment. Therefore, the rollover sensing algorithm of the vehicle determines the exact time point and position in time, thereby opening a specific airbag or actively tightening a seatbelt tied to the occupant.
Application of MEMS Sensors in Anti-slip System
The electronic stability program system is also an important application area for MEMS sensors. It can improve the driving stability of the vehicle in all driving situations. The sensor measures the yaw rate of the vehicle and compares it with other parameters such as steering angle and speed to detect driving conditions such as oversteering or insufficient steering. If ESP is required during driving, the system will automatically brake the wheels separately. Therefore, the signal provided by the sensor is the fundamental basis for the implementation of the ESP algorithm and is the key to improving the stability of the vehicle.
Application of MEMS Sensors in Car Navigation System
The development trend of yaw sensors in automotive safety system applications is high offset stability, robustness to vibration, and full digital signal processing. This makes it more durable than analog sensors. Permanent active internal fault detection makes it possible to identify faults as well as active self-tests, thus helping to increase reliability. In addition, according to the needs of the vehicle system design, the sensor string can monitor yaw rate and acceleration in different vehicle directions due to its flexible structure.
With the arrival of the new technology revolution, the world has begun to enter the information age. In the process of using information, the first thing to solve is to obtain accurate and reliable information, and sensors are the main means and means for acquiring information in the natural and production fields.
In the modern industrial production, especially in the automatic control production process, various sensors are used to monitor and control various parameters in the production process so that the equipment operates in a normal state or an optimal state, and the products achieve the best quality. Therefore, it can be said that without numerous excellent sensors, modern production loses its foundation.
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